Abstract

The comb-drive actuator is one of the main building blocks of microelectromechanical systems (MEMS). Its working principle is based on an electrostatic force that is generated between biased conductor plates as one moves relative to the other. Because of its capability of force generation, it finds wide application in micro-mechanical systems. Sample applications include polysilicon microgrippers [1], scanning probe devices [2], force-balanced accelerometers [3], actuation mechanisms for rotating devices [4], laterally oscillating gyroscopes [5], and RF filters [6]. Consequently, any improvement to this basic actuator could have far-reaching effects.

Volume Subject Area:
Micro-Electro-Mechanical Systems
Topics:
Design, Microelectromechanical systems, Simulation, Actuators, Accelerometers, Blocks (Building materials), Filters, Oscillations, Plates (structures), Polysilicon, Probes
This content is only available via PDF.
Copyright © 2001 by The American Society of Mechanical Engineers
You do not currently have access to this content.