The development and low frequency testing of a micro heat engine is presented. Production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an external combustion engine in which thermal power is converted to mechanical power through a novel thermodynamic cycle. Mechanical power is converted into electrical power through the use of a thin-film piezoelectric membrane generator. This design is well suited to photolithography-based batch fabrication methods and is unlike any conventionally manufactured macro-scale engine. A peak-to-peak voltage of .84 volts, and power output of 1.5 microwatts have been realized at operating speeds of 10 Hz. Measurements are also presented for the engine operating at resonant conditions. Cycle speeds up to 240 Hz have been obtained, with peak-to-peak voltages of 70 millivolts.

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