We present a novel micromechanical filter exploiting the subharmonic resonance of order one-half to obtain a center frequency twice the fundamental frequency of the primary resonators, an ideal stopband, and a sharp roll-off. The filter is made up of two clamped-clamped microbeam resonators connected by a coupling beam. We discretize the distributed-parameter system using the Galerkin procedure to obtain a reduced-order model composed of two nonlinear coupled ODEs. It accounts for geometrical and electrical nonlinearities as well as the coupling between these two fields. Using the method of multiple scales, we determine four first-order nonlinear ODEs describing the amplitudes and phases of the modes. We use these equations to determine closed-form expressions for the static and dynamic deflections of the filter. The basis functions in the discretization are the linear undamped global mode shapes of the unactuated filter. The filtering mechanism is based on the exploitation of the interval where the trivial response to subharmonic excitations is unstable. We found criteria to tune the effective nonlinearities of the filter to realize a bandpass filter of an ideal stopband rejection and a sharp roll-off. When these criteria are not met, multivalued responses appear and distort the filter performance.
Skip Nav Destination
ASME 2007 International Mechanical Engineering Congress and Exposition
November 11–15, 2007
Seattle, Washington, USA
Conference Sponsors:
- ASME
ISBN:
0-7918-4303-3
PROCEEDINGS PAPER
A Subharmonic Resonance-Based MEMS Filter
Bashar K. Hammad,
Bashar K. Hammad
Virginia Polytechnic Institute and State University, Blacksburg, VA
Search for other works by this author on:
Ali H. Nayfeh,
Ali H. Nayfeh
Virginia Polytechnic Institute and State University, Blacksburg, VA
Search for other works by this author on:
Eihab Abdel-Rahman
Eihab Abdel-Rahman
University of Waterloo, Waterloo, ON, Canada
Search for other works by this author on:
Bashar K. Hammad
Virginia Polytechnic Institute and State University, Blacksburg, VA
Ali H. Nayfeh
Virginia Polytechnic Institute and State University, Blacksburg, VA
Eihab Abdel-Rahman
University of Waterloo, Waterloo, ON, Canada
Paper No:
IMECE2007-42201, pp. 303-312; 10 pages
Published Online:
May 22, 2009
Citation
Hammad, BK, Nayfeh, AH, & Abdel-Rahman, E. "A Subharmonic Resonance-Based MEMS Filter." Proceedings of the ASME 2007 International Mechanical Engineering Congress and Exposition. Volume 9: Mechanical Systems and Control, Parts A, B, and C. Seattle, Washington, USA. November 11–15, 2007. pp. 303-312. ASME. https://doi.org/10.1115/IMECE2007-42201
Download citation file:
5
Views
0
Citations
Related Proceedings Papers
MEMS Coupled Resonator for Filter Application in Air
IDETC-CIE2017
Related Articles
On the Use of the Subharmonic Resonance as a Method for Filtration
J. Comput. Nonlinear Dynam (October,2011)
An Efficient Reduced-Order Model to Investigate the Behavior of an Imperfect Microbeam Under Axial Load and Electric Excitation
J. Comput. Nonlinear Dynam (January,2013)
Tunable Microelectromechanical Filters that Exploit Parametric Resonance
J. Vib. Acoust (October,2005)
Related Chapters
KPCA-Kalman Filtering for the MEMS-SINS/GPS Integrated Navigation System
International Symposium on Information Engineering and Electronic Commerce, 3rd (IEEC 2011)
Application Analysis and Experimental Study on Performance of Energy-Saving Electret Fiber
Inaugural US-EU-China Thermophysics Conference-Renewable Energy 2009 (UECTC 2009 Proceedings)
Based on Hybrid Recommendation Personalized of the E-Learning System Study
Proceedings of the 2010 International Conference on Mechanical, Industrial, and Manufacturing Technologies (MIMT 2010)