The ironless permanent magnet planar motors (IPMPMs) are used in the lithography machine to realize long stroke x, y translation with single mover. The lack of rotation motion limits its use in a wide range of applications. This paper proposes a hybrid model for the IPMPM to realize the rotational motion. Based on the decoupling feature, the influence cause by the x, y translation and the rotation can be expressed by the position functions and 1-d lookup table (LUT) respectively. To the coils with centro-symmetry, the hybrid model can be further simplified. Then simulations about the calculation speed and the model accuracy are conducted. Compared with the 3-d LUT, the hybrid model cost less time with relative high accuracy. Finally the validity of the hybrid model is verified by experiment.
Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors
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Yuan, D, Zhang, M, Zhu, Y, Li, X, & Wang, L. "Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors." Proceedings of the ASME 2018 International Mechanical Engineering Congress and Exposition. Volume 10: Micro- and Nano-Systems Engineering and Packaging. Pittsburgh, Pennsylvania, USA. November 9–15, 2018. V010T13A007. ASME. https://doi.org/10.1115/IMECE2018-87007
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