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Manufacturing of MEMS and Related Micro/Nano Systems
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Proceedings Papers

Design, Fabrication, and Testing of a Continuous Flow, Submicroliter Scale PCR for the Analysis of Plant Genomes

Wei Zheng, Shaochen Chen
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 845-849, November 11–16, 2001
Paper No: IMECE2001/MEMS-23921
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23921
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Topics: Design, Flow (Dynamics), Manufacturing, Microelectromechanical systems, Testing, Semiconductor wafers, Borosilicate glasses, Glass, Microchannels, Micromachining
Proceedings Papers

Fabrication of Novel Polysilazane MEMS Structures by Microcasting

Li-Anne Liew, Tsali Cross, Victor M. Bright, Rishi Raj
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 837-844, November 11–16, 2001
Paper No: IMECE2001/MEMS-23920
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23920
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Topics: Manufacturing, Microelectromechanical systems, Glass, Transparency, Absorption, Casting, Diffraction gratings, Optical instruments, Photoresists, Temperature
Proceedings Papers

Characterization of Drying Techniques for Micro-Stereolithography

Dongmin Wu, Nicholas Fang, Cheng Sun, Xiang Zhang
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 831-835, November 11–16, 2001
Paper No: IMECE2001/MEMS-23919
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23919
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Topics: Drying, Microelectromechanical systems, Stereolithography, Adhesion, Polymers, Manufacturing, Resins, Surface tension, Collapse, Deflection
Proceedings Papers

Noncontact Physical Removal of Nano-Scale Particles From Surfaces

Ahmed A. Busnaina, Hong Lin
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 827-830, November 11–16, 2001
Paper No: IMECE2001/MEMS-23918
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23918
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Topics: Acoustics, Microelectromechanical systems, Nanoscale phenomena, Particulate matter, Fluctuations (Physics), Integrated circuit fabrication, Nanoparticles, Pressure, Semiconductor wafers, Semiconductors (Materials)
Proceedings Papers

A Batch Fabrication Micro-Ball Array for Optical Coupling in Free Space Communication

S.-C. Shen, H.-P. Chou
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 851-857, November 11–16, 2001
Paper No: IMECE2001/MEMS-23922
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23922
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Topics: Lenses (Optics), Manufacturing, Microelectromechanical systems, Semiconductor wafers, Vacuum, Fibers, Optical fiber, Silicon, Anisotropy, Bonding