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Keywords: microcontamination
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Proceedings Papers

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 827-830, November 11–16, 2001
Paper No: IMECE2001/MEMS-23918
... particles surface cleaning acoustic streaming megasonics microcontamination Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16, 2001, New York, NY MEMS-Vol. 3 IMECE2001 /MEMS-23918 NONCONTACT PHYSICAL REMOVAL OF NANO-SCALE PARTICLES FROM SURFACES...