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Keywords: ultra-precision motions systems
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Proceedings Papers

Proc. ASME. IMECE2019, Volume 4: Dynamics, Vibration, and Control, V004T05A023, November 11–14, 2019
Paper No: IMECE2019-11206
...Abstract Abstract Ever-increasing demands for precision and efficiency in ultra-precision motion systems will result in a lightweight and flexible motion system with complex dynamics. In this paper, a systematic approach is proposed where control gains, 3D structural topology and actuator...