1-2 of 2
Q-factor
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles

Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping

Chu Rainer Kwang-Hua
Journal: Journal of Dynamic Systems, Measurement, and Control
Article Type: Technical Briefs
J. Dyn. Sys., Meas., Control. September 2020, 142(9): 094502.
Paper No: DS-19-1164
https://doi.org/10.1115/1.4047012
Published Online: May 11, 2020
View Article titled, Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping
Open the PDF for Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping in another window
Topics: Cantilevers, Damping, Fluids, Microelectromechanical systems, Pressure, Q-factor, Knudsen number, Energy dissipation, Resonance, Semiconductor wafers
Journal Articles

Frequency Sweeping With Concurrent Parametric Amplification

Nicholas J. Miller, Steven W. Shaw
Journal: Journal of Dynamic Systems, Measurement, and Control
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. March 2012, 134(2): 021007.
https://doi.org/10.1115/1.4005363
Published Online: December 30, 2011
View Article titled, Frequency Sweeping With Concurrent Parametric Amplification
Open the PDF for Frequency Sweeping With Concurrent Parametric Amplification in another window
Topics: Excitation, Resonance, Pumps, Stability, Q-factor, Sensors, Microelectromechanical systems