In this study, the reliability performance of two capillary-type underfill materials with different glass transition temperatures (Tg) and coefficients of thermal expansion (CTE) were assessed for a chip stacking architecture. The microbumps for integrating four chips on a Si interposer were with a pitch size of 20 μm and composed of 5 μm Cu/3 μm Ni/5 μm Sn2.5Ag solder cap. A thermocompressive bonder was used to interconnect the microbumps at 280 °C for 15 s, and the microgaps between the chips and the interposer were then, respectively, sealed by the mentioned underfill materials to form a chip stacking architecture. Then, the reliability characteristics of the test vehicles were evaluated following the preconditioning and temperature cycling test (TCT). Furthermore, a numerical analysis model was established by ansys software to study the stress and strain contours of the microjoints sealed by different underfill materials. It was found that the lifetime of microjoints was highly related to the Tg points of underfills, an interfacial fracture was observed within the microjoints sealed by a lower Tg underfill after temperature cycling because the tensile strength damaged the Sn depletion zone as heated.

References

1.
Banijamali
,
B.
,
Ramalingam
,
S.
,
Nagarajan
,
K.
, and
Chaware
,
R.
,
2011
, “
Advanced Reliability Study of TSV Interposers and Interconnects for the 28nm Technology FPGA
,”
IEEE 61st Electronic Components Technology Conference
(
ECTC
), Lake Buena Vista, FL, May 31–June 3, pp.
286
290
.10.1109/ECTC.2011.5898527
2.
Li
,
Z.
,
Shi
,
H.
,
Xie
,
J.
, and
Rahman
,
A.
,
2012
, “
Development of an Optimized Power Delivery System for 3D IC Integration With TSV Silicon Interposer
,”
IEEE 62nd Electronic Components Technology Conference
(
ECTC
), San Diego, CA, May 29–June 1, pp.
678
682
.10.1109/ECTC.2012.6248905
3.
Lau
,
J. H.
,
2014
, “
Overview and Outlook of Three-Dimensional Integrated Circuit Packaging, Three-Dimensional Si Integration, and Three-Dimensional Integrated Circuit Integration
,”
ASME J. Electron. Packag.
,
136
(
4
), p.
040801
.10.1115/1.4028629
4.
Yu
,
A.
,
Lau
,
J. H.
,
Soon Wee
,
Ho.
,
Kumar
,
A.
,
Wai Yin
,
Hnin.
,
Da-Quan
,
Yu.
,
Ming Ching
,
Jong.
,
Kripesh
,
V.
,
Pinjala
,
D.
, and
Dim-Lee
,
Kwong.
,
2009
, “
Study of 15 μm Pitch Solder Microbumps for 3D IC Integration
,”
59th Electronic Components Technology Conference
(
ECTC 2009
), San Diego, CA, May 26–29, pp.
6
10
.10.1109/ECTC.2009.5073988
5.
Liu
,
D.
, and
Park
,
S.
,
2014
, “
Three-Dimensional and 2.5 Dimensional Interconnection Technology: State of the Art
,”
ASME J. Electron. Packag.
,
136
(
1
), p.
014001
.10.1115/1.4026615
6.
Chang
,
J. Y.
,
Cheng
,
R. S.
,
Kao
,
K. S.
,
Chang
,
T. C.
, and
Chuang
,
T. H.
,
2012
, “
Reliable Microjoints Formed by Solid–Liquid Interdiffusion (SLID) Bonding Within a Chip Stacking Architecture
,”
IEEE Trans. Compon., Packag. Manuf.
,
2
(
6
), pp.
979
984
.10.1109/TCPMT.2012.2190290
7.
Paunovic
,
M.
,
Bailey
,
P. J.
,
Schad
,
R. G.
, and,
Smith
,
D. A.
,
1994
, “
Electrochemically Deposited Diffusion Barriers
,”
J. Electrochem. Soc.
,
141
(
7
), pp.
1843
1850
.10.1149/1.2055015
8.
Lee
,
B.
,
Jeon
,
H.
,
Kim
,
S.
,
Kwon
,
K. W.
,
Kim
,
J. W.
, and
Lee
,
H. J.
,
2011
, “
Introduction of an Electroless-Plated Ni Diffusion Barrier in Cu/Sn/Cu Bonding Structures for 3D Integration
,”
J. Electrochem. Soc.
,
159
(
2
), pp.
H85
H89
.10.1149/2.007202jes
9.
Huang
,
S. Y.
,
Chang
,
T.-C.
,
Cheng
,
R.-S.
,
Chang
,
J.-Y.
,
Fan
,
C.-W.
,
Zhan
,
C.-J.
,
Lau
,
J. H.
,
Chen
,
T.-H.
,
Lo
,
W.-C.
, and
Kao
,
M.-J.
,
2011
, “
Failure Mechanism of 20 μm Pitch Microjoint Within a Chip Stacking Architecture
,”
IEEE 61st Electronic Components Technology Conference
(
ECTC
), Lake Buena Vista, FL, May 31–June 3, pp.
886
892
.10.1109/ECTC.2011.5898616
10.
Huang
,
S. Y.
,
Chang
,
T. C.
,
Cheng
,
R. S.
,
Chang
,
J. Y.
,
Leu
,
F. J.
,
Lu
,
Y. L.
, and
Yang
,
T. F.
,
2010
, “
Reliability Assessment of the 20 μm Pitch Microjoints Within a 3DIC Assembly Under Various Environments
,”
5th International Microsystems Packaging Assembly and Circuits Technology Conference
(
IMPACT
), Taipei, Oct. 20–22.10.1109/IMPACT.2010.5699594
11.
Yole Dévelopment
,
2010
, “
Interview With Dr. William Chen of ASE
,” 3D Packaging Magazine on 3D-IC, TSV, WLP, and Embedded Technologies, 17(Nov.), pp.
10
12
.
12.
JEDEC,
2003
, “
Preconditioning of Nonhermetic Surface Mount Devices Prior to Reliability Test
,” JEDEC Solid State Technology Association, Arlington, VA, Standard No. JESD22-A113D.
13.
JEDEC,
2000
, “
Temperature Cycling
,” JEDEC Solid State Technology Association, Arlington, VA, Standard No. JESD22-A104-B.
14.
Ashraf Khan
,
M.
,
Zheng
,
Q.
,
Kopp
,
D.
,
Buckhanan
,
W.
,
Kulick
,
J. M.
,
Fay
,
P.
,
Kriman
,
A. M.
, and
Bernstein
,
G. H.
,
2015
, “
Thermal Cycling Study of Quilt Packaging
,”
ASME J. Electron. Packag.
,
137
(
2
), p.
021008
.10.1115/1.4029245
15.
Wiese
,
S.
, and
Rzepka
,
S.
,
2004
, “
Time-Independent Elastic–Plastic Behavior of Solder Materials
,”
Microelectron. Reliab.
,
44
(
12
),
1893
1900
.10.1016/j.microrel.2004.04.015
16.
Iannuzzelli
,
R.
,
1991
, “
Predicting Plated-Through-Hole Reliability in High Temperature Manufacturing Processes
,”
41st Electronic Components and Technology Conference
(
ECTC
), Atlanta, May 11–16, pp.
410
421
.10.1109/ECTC.1991.163908
17.
Lee
,
C. C.
, and
Lin
,
P. T.
,
2014
, “
Reliability-Based Design Guidance of Three-Dimensional Integrated Circuits Packaging Using Thermal Compression Bonding and Dummy Cu/Ni/SnAg Microbumps
,”
ASME J. Electron. Packag.
,
136
(
3
), p.
031006
.10.1115/1.4026854
18.
Lee
,
C. C.
,
Yang
,
T. F.
,
Wu
,
C. S.
,
Kao
,
K. S.
,
Cheng
,
R. C.
, and
Chen
,
T. H.
,
2013
, “
Reliability Estimation and Failure Mode Prediction for 3D Chip Stacking Package With the Application of Wafer-Level Underfill
,”
Microelectron. Eng.
,
107
, pp.
107
113
.10.1016/j.mee.2012.08.022
19.
Lee
,
C. C.
,
Chang
,
K. C.
, and
Yang
,
Y. W.
,
2009
, “
Lead-Free Solder Joint Reliability Estimation of Flip Chip Package Using FEM-Based Sensitivity Analysis
,”
Solder. Surf. Mount Technol.
,
21
(
1
), pp.
31
41
.10.1108/09540910910928283
20.
Lee
,
C. C.
,
Liu
,
H. C.
, and
Chiang
,
K. N.
,
2007
, “
3D Structure Design and Reliability Analysis of Wafer Level Package With Stress Buffer Mechanism
,”
IEEE Trans. Compon. Packag. Technol.
,
30
(
1
), pp.
110
118
.10.1109/TCAPT.2007.892083
21.
Yuan
,
C. A.
,
Han
,
C. N.
,
Yew
,
M. C.
,
Chou
,
C. Y.
, and
Chiang
,
K. N.
,
2005
, “
Design, Analysis and Development of Novel Three-Dimensional Stacking WLCSP
,”
IEEE Trans. Adv. Packag.
,
28
(
3
), pp.
387
396
.10.1109/TADVP.2005.852894
22.
Lin
,
J. C.
,
Cheng
,
H. C.
, and
Chiang
,
K. N.
,
2005
, “
Design and Analysis of Wafer-Level CSP With Double Pad Structure
,”
IEEE Trans. Compon. Packag. Technol.
,
28
(
1
), pp.
117
126
.10.1109/TCAPT.2005.843216
23.
Wang
,
T. H.
,
Lai
,
Y. S.
, and
Wu
,
J. D.
,
2004
, “
Effect of Underfill Thermomechanical Properties on Thermal Cycling Fatigue Reliability of Flip Chip Ball Grid Array
,”
ASME J. Electron. Packag.
,
126
(
4
), pp.
560
564
.10.1115/1.1827271
24.
Cheng
,
R. S.
,
Chang
,
H. J.
,
Chang
,
T. C.
, and
Chou
,
J. H.
,
2012
, “
Early Failure Induced by Phase Transformation in Microjoints for Chip-Level Integration
,”
Electrochem. Solid-State Lett.
,
15
(
3
), pp.
H75
H77
.10.1149/2.023203esl
25.
Lau
,
J. H.
,
2011
,
Reliability of RoHS Compliant 2D & 3D IC Interconnects
,
McGraw-Hill
,
New York
.
26.
Zhan
,
C. J.
,
Chuang
,
C.-C.
,
Juang
,
J.-Y.
,
Lu
,
S.-T.
, and
Chang
,
T.-C.
,
2010
, “
Assembly and Reliability Characterization of 3D Chip Stacking With 30 μm Pitch Lead-Free Solder Micro Bump Interconnection
,”
60th Electronic Component Technology Conference
(
ECTC
), Las Vegas, June 1–4, pp.
1043
1049
.10.1109/ECTC.2010.5490829
27.
Zhang
,
Z.
,
Park
,
S. B.
,
Darhba
,
K.
, and
Master
,
R. N.
,
2010
, “
Effect of Glass Transition Slope of Underfill on Solder Joint Fatigue Life
,”
11th International Conference on Electronic Packaging Technology and High Density Packaging
(
ICEPT-HDP
), Xi'an, China, Aug. 16–19, pp.
350
355
.10.1109/ICEPT.2010.5582348
28.
Lin
,
C.
,
Suhling
,
J. C.
, and
Lall
,
P.
,
2009
, “
Isothermal Aging Induced Evolution of the Material Behavior of Underfill Encapsulants
,”
59th Electronic Components Technology Conference
(
ECTC 2009
), San Diego, May 26–29, pp.
134
149
.10.1109/ECTC.2009.5074007
29.
Chang
,
J.-Y.
,
Huang
,
S. Y.
,
Cheng
,
R. S.
,
Leu
,
F. J.
,
Zhan
,
C. J.
, and
Chang
,
T. C.
,
2010
, “
High Throughput Chip on Wafer Assembly Technology and Metallurgical Reactions of Pb-Free Micro-Joints Within a 3DIC Package
,”
International Conference of Electronic Packaging
(
ICEP2010
), Sapporo, Japan, May 12–14, pp.
159
164
.
30.
Lloyd
,
J. R.
,
Connelly
,
N. A.
,
He
,
X.
,
Ryan
,
K. J.
, and
Wood
,
B. H.
,
2010
, “
Fast Diffusers in a Thermal Gradient (Solder Ball)
,”
Microelectron. Reliab.
,
50
(
9–11
), pp.
1355
1358
.10.1016/j.microrel.2010.07.067
31.
Spivak
,
A.
,
1974
, “
Gravity Segregation in Two-Phase Displacement Processes
,”
SPE J.
,
14
(
6
), pp.
619
632
.10.2118/4630-PA
32.
Shabestari
,
S. G.
, and
Gruzleski
,
J. E.
,
1995
, “
Gravity Segregation of Complex Intermetallic Compounds in Liquid Al–Si Alloys
,”
Metall. Mater. Trans. A
,
26
(
4
), pp.
999
1006
.10.1007/BF02649097
33.
Shen
,
J.
,
Chan
,
Y. C.
, and
Liu
,
S. Y.
,
2009
, “
Growth Mechanism of Ni3Sn4 in a Sn/Ni Liquid/Solid Interfacial Reaction
,”
Acta Mater.
,
57
(
17
), pp.
5196
5206
.10.1016/j.actamat.2009.07.021
34.
Yang
,
R. W.
,
Chang
,
Y. W.
,
Sung
,
W. C.
, and
Chen
,
C.
,
2012
, “
Precipitation of Large Ag3Sn Intermetallic Compounds in Sn2.5Ag Microbumps After Multiple Reflows in 3DIC Packaging
,”
Mater. Chem. Phys.
,
134
(
1
), pp.
340
344
.10.1016/j.matchemphys.2012.02.074
35.
Hsu
,
H. H.
,
Huang
,
S. Y.
,
Chang
,
T. C.
, and
Wu
,
A. T.
,
2011
, “
Nucleation and Propagation of Voids in Microbumps for 3 Dimensional Integrated Circuits
,”
Appl. Phys. Lett.
,
99
(
25
), p.
251913
.10.1063/1.3671391
You do not currently have access to this content.