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Keywords: nanoimprint lithography
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Journal Articles
Article Type: Technical Briefs
J. Manuf. Sci. Eng. December 2013, 135(6): 064501.
Paper No: MANU-13-1184
Published Online: November 5, 2013
...Bhavik C. Patel; Ankur Jain 1 Corresponding author. Manuscript received April 26, 2013; final manuscript received September 21, 2013; published online November 5, 2013. Assoc. Editor: Yung Shin. 26 04 2013 21 09 2013 Nanoimprint lithography (NIL) is a promising...
