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Keywords: thermal management
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Journal Articles
Journal Articles
Article Type: Technical Briefs
J. Manuf. Sci. Eng. December 2013, 135(6): 064501.
Paper No: MANU-13-1184
Published Online: November 5, 2013
... to the desired substrate features. While the template is close to contact with the substrate, the monomer is cured by UV exposure. This results in definition of desired features on the substrate. While NIL has the potential of defining very small feature sizes, thermal management of this process is critical...